EUV scatterometer with a high-harmonic-generation EUV source

Wide-field Broadband EUV Transmission Ptychography using a High Harmonic Source

High harmonic generation (HHG) provides a laboratory scale source of coherent radiation ideally suited to lensless coherent diffractive imaging (CDI) in the EUV and X-ray spectral region. Here we demonstrate transmission EUV ptychography, a scanning variant of CDI, using radiation at a wavelength around 29 nm from an HHG source. Image resolution is diffraction-limited at 54 nm, and fields of vi...

High Efficiency Collector for Laser Plasma EUV Source

Performance study of a soft X-ray harmonic generation FEL seeded with an EUV laser pulse

The performance of a free electron laser (FEL) using a low-power extreme ultraviolet (EUV) pulse as an input seed is investigated. The parameters are appropriate for 30 nm seeds produced from high-power Ti:Sapphire pulses using high harmonic generation schemes. It is found that, for reasonable beam parameters, robust FEL performance can be obtained. Both time-independent and time-dependent simu...

High efficiency tin-based EUV sources

We have previously proposed ithography applications. Here we report advances in measurement

Debris-free Euv Source for At-wavelength Metrology

Parallel to the development and optimization of high-power EUV sources for lithography, the realization of low-cost EUV sources for at-wavelength metrology is strongly required. These sources are important tools for the characterization of EUV mirrors and masks, for the determination of thin film transmission (EUV filters), for research on resist materials, and for the calibration of EUV detect...